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Thermal response of AlN and CNx films as coatings of thin film anemometers

Autor
J. Arroyo; Silvestre, S.; Coll, A.; Castañer, L.
Tipus d'activitat
Article en revista
Revista
Measurement
Data de publicació
2013-05
Volum
46
Número
4
Pàgina inicial
1421
Pàgina final
1426
DOI
https://doi.org/10.1016/j.measurement.2012.12.003 Obrir en finestra nova
Projecte finançador
AYA2010-20847
Repositori
http://hdl.handle.net/2117/19864 Obrir en finestra nova
URL
http://www.sciencedirect.com/science/article/pii/S0263224112004708 Obrir en finestra nova
Resum
Layers of AlN and CNx were investigated as suitable films to coat thin film anemometers because they are simultaneously electrical isolators and thermal conductors. Thermal time constants were measured and thermal equivalent models are proposed in this work. AlN performed better in the experiments.
Citació
J. Arroyo [et al.]. Thermal response of AlN and CNx films as coatings of thin film anemometers. "Measurement", Maig 2013, vol. 46, núm. 4, p. 1421-1426.
Paraules clau
AlN, CNx, Thin film anemometers
Grup de recerca
MNT - Grup de Recerca en Micro i Nanotecnologies

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