An electrospray technique has been used to deposit SiO2 nanoparticles as insulator layer of a metal-insulator-metal device. Impedance spectroscopy measurements show that a 4.4 factor increase in capacitance is achieved compared to a continuous dielectric layer of the same permittivity and dimensions.
Veliz, B. [et al.]. Metal-insulator-metal capacitor using electrosprayed nanoparticles. "Applied physics letters", 07 Juliol 2014, vol. 105, p. 013109-1-013109-4.