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Macroporous silicon for high-capacitance devices using metal electrodes

Autor
Vega, D.; Reina, J.; Martin, F.; Pavón, R.; Rodriguez, A.
Tipus d'activitat
Article en revista
Revista
Nanoscale Research Letters
Data de publicació
2014-09-05
Volum
9
DOI
https://doi.org/10.1186/1556-276X-9-473 Obrir en finestra nova
Projecte finançador
Cristales fotónicos y manipulación de nanopartículas enfocados a su aplicación como sensores en el infrarojo
Repositori
http://hdl.handle.net/2117/24556 Obrir en finestra nova
URL
http://www.nanoscalereslett.com/content/9/1/473 Obrir en finestra nova
Resum
In this paper, high-capacity energy storage devices based on macroporous silicon are demonstrated. Small footprint devices with large specific capacitances up to 100 nF/mm(2), and an absolute capacitance above 15 mu F, have been successfully fabricated using standard microelectronics and MEMS techniques. The fabricated devices are suitable for high-density system integration. The use of 3-D silicon structures allows achieving a large surface to volume ratio. The macroporous silicon structures ar...
Citació
Vega, D. [et al.]. Macroporous silicon for high-capacitance devices using metal electrodes. "Nanoscale Research Letters", 05 Setembre 2014, vol. 9.
Paraules clau
Arrays, Carbon, Density, Design, Electro-deposition, Electrochemical capacitors, Electrochemical etching, Electrodeposition, Electroplating, Energy storage, High-density capacitors, Macroporous silicon, Physics, Porous silicon, Supercapacitors
Grup de recerca
MNT - Grup de Recerca en Micro i Nanotecnologies

Participants

  • Vega Bru, Didac  (autor)
  • Reina Marsinyach, Jordi  (autor)
  • Martin, Ferran  (autor)
  • Pavón Urbano, Ramón  (autor)
  • Rodriguez Martinez, Angel  (autor)

Arxius