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Real-time characterization of dielectric charging in contactless capacitive MEMS

Autor
Dominguez, M.; Gorreta, S.; Pons, J.; Blokhina, E.; Giounanlis, P.; Feely, O.
Tipus d'activitat
Article en revista
Revista
Analog integrated circuits and signal processing
Data de publicació
2015-03-01
Volum
82
Número
3
Pàgina inicial
559
Pàgina final
569
DOI
https://doi.org/10.1007/s10470-014-0458-y Obrir en finestra nova
Projecte finançador
Diseño de tecnologías integradas reconfigurables de microondas con MEMS de RF
Repositori
http://hdl.handle.net/2117/27244 Obrir en finestra nova
Resum
This paper presents a new method to characterize the dynamics of the charge trapped in the dielectric layer of contactless microelectromechanical systems. For sampled-time systems, this allows knowing the state of the net charge at each sampling time without distorting the measurement. This approach allows one to model the expected behaviour of dielectric charging as a response to a sigma-delta control of charge. The goodness of the proposed approach is obtained by matching the experimentally ob...
Citació
Dominguez, M. [et al.]. Real-time characterization of dielectric charging in contactless capacitive MEMS. "Analog integrated circuits and signal processing", 01 Març 2015, vol. 82, núm. 3, p. 559-569.
Paraules clau
Dielectric charge characterization, Dielectric charge control, Dielectric charge dynamics, MEMS reliability, SWITCHES
Grup de recerca
MNT - Grup de Recerca en Micro i Nanotecnologies

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