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Characterization of dynamics and power handling of RF MEMS using vector measurement techniques

Autor
Girbau, D.; Lázaro, A.; Pradell, L.
Tipus d'activitat
Article en revista
Revista
IEEE transactions on microwave theory and techniques
Data de publicació
2004-11
Volum
52
Número
11
Pàgina inicial
2627
Pàgina final
2633
URL
http://hdl.handle.net/2117/1076 Obrir en finestra nova
Resum
This paper proposes a new method to measure dynamics and power handling of RF microelectromechanical systems (MEMS) devices based on a mobile membrane. The method uses in-phase/quadrature demodulation of an RF signal proportional to the reflection coefficient of the measured device, which contains information of its mechanical properties, such as actuation and release times and instantaneous position of the mobile membrane. Both one-port (capacitors) and two-port devices (switches and extended t...
Citació
Girbau, D.; Lázaro, A.; Pradell, L. Characterization of dynamics and power handling of RF MEMS using vector measurement techniques. IEEE Transactions on microwave theory and techniques, vol. 52, núm. 11, p. 2627-2633.
Grup de recerca
RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones

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