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Nonlinear actuation model for lateral electrostatically-actuated DC-contact RF MEMS series switches

Autor
Lázaro, A.; Girbau, D.; Pradell, L.; Nebot, À.
Tipus d'activitat
Article en revista
Revista
Microwave and optical technology letters
Data de publicació
2007-06
Volum
49
Número
6
Pàgina inicial
1238
Pàgina final
1241
DOI
https://doi.org/10.1002/mop.22450 Obrir en finestra nova
URL
http://onlinelibrary.wiley.com/doi/10.1002/mop.22450/full Obrir en finestra nova
Resum
In this work, a nonlinear model to predict actuation characteristics in lateral electrostatically-actuated DC-contact MEMS switches is proposed. In this case a parallel-plate approximation cannot be applied. The model is based on the equilibrium equation for an elastic beam. It is demonstrated that the contribution of fringing fields is essential. The model relies on finite-difference discretization of the structures, applying boundary conditions and is solved with a Gauss-Seidel relaxation iter...
Paraules clau
Electrostatic actuation, In-plane switch, Interdigital, MEMS
Grup de recerca
RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones

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