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Electro-acoustical characterization procedure for cMUTs

Autor
Buigas, M.; Montero de Espinosa, F.; Schmitz, G.; Ameijeiras, I.; Dominguez, M.; Masegosa, P.
Tipus d'activitat
Article en revista
Revista
Ultrasonics
Data de publicació
2005-03
Volum
43
Número
5
Pàgina inicial
383
Pàgina final
390
DOI
https://doi.org/10.1016/j.ultras.2004.07.006 Obrir en finestra nova
URL
http://www.sciencedirect.com/science?_ob=ArticleURL&_aset=V-WA-A-W-A-MsSAYZA-UUW-U-AABAAAUYVD-AAWYZEAZVD-BYBCVACAY-A-U&_rdoc=1&_fmt=summary&_udi=B6TW2-4D2C7GR-2&_coverDate=03%2F01%2F2005&_cdi=5550&_orig=search&_st=13&_sort=d&view=c&_acct=C000053450&_versi Obrir en finestra nova
Resum
A procedure for the electro-acoustical characterization in air of cMUTs is reported. First, the measured input electrical impedance of the transducer is used to calculate the transducer parameters at different bias voltages by fitting it with the Mason model. Then, the single membrane equivalent circuit can be calculated. Second, the cMUT impulse response is obtained through a send-and-receive experiment to be compared with the one predicted by the Mason model. In order to minimize the influence...
Paraules clau
Electro-acoustical characterization, cMUT
Grup de recerca
MNT - Grup de Recerca en Micro i Nanotecnologies

Participants

  • Buigas, Marta  (autor)
  • Montero de Espinosa Feijo, Francisco  (autor)
  • Schmitz, Georg  (autor)
  • Ameijeiras, Iñaki  (autor)
  • Dominguez Pumar, Manuel M.  (autor)
  • Masegosa, Pedro  (autor)