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Simultaneous control of dielectric charge and device capacitance in electrostatic MEMS

Autor
Gorreta, S.; Pons, J.; Dominguez, M.
Tipus d'activitat
Article en revista
Revista
Journal of microelectromechanical systems
Data de publicació
2015-12
Volum
24
Número
6
Pàgina inicial
1684
Pàgina final
1686
DOI
https://doi.org/10.1109/JMEMS.2015.2493581 Obrir en finestra nova
Repositori
http://hdl.handle.net/2117/84744 Obrir en finestra nova
Resum
This letter presents a double closed loop for simultaneously controlling the net dielectric charge and the device capacitance in contactless electrostatic MEMS devices. The first loop controls the net charge trapped in the dielectric layer by continuously monitoring the horizontal displacement of the C–V characteristic and applying bipolar actuation voltages to keep such net charge at the target value. The second loop adapts the actuation voltages so that the measured capacitance matches a ...
Citació
Gorreta, S., Pons, J., Dominguez, M. Simultaneous control of dielectric charge and device capacitance in electrostatic MEMS. "Journal of microelectromechanical systems", Desembre 2015, vol. 24, núm. 6, p. 1684-1686.
Paraules clau
Dielectric charging, MEMS, charge control, positioners, varactors
Grup de recerca
MNT - Grup de Recerca en Micro i Nanotecnologies

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