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Microcantilever Displacement Measurement Using a Mechanically Modulated Optical Feedback Interferometer

Autor
Azcona, F. J.; Jha, A.; Yañez, C.; Atashkhooei, R.; Royo, S.
Tipus d'activitat
Article en revista
Revista
Sensors
Data de publicació
2016-06-29
Volum
16
Número
7
Pàgina inicial
997-1
Pàgina final
997-17
DOI
https://doi.org/10.3390/s16070997 Obrir en finestra nova
Repositori
http://hdl.handle.net/2117/90027 Obrir en finestra nova
URL
http://www.mdpi.com/1424-8220/16/7/997 Obrir en finestra nova
Resum
Microcantilever motion detection is a useful tool for the characterization of the physical, chemical and biological properties of materials. In the past, different approaches have been proposed and tested to enhance the behavior, size and simplicity of microcantilever motion detectors. In this paper, a new approach to measure microcantilever motion with nanometric resolution is presented. The proposed approach is based on the concept of mechanically-modulated optical feedback interferometry, a t...
Citació
Azcona, F. J., Jha, A., Yañez, C., Atashkhooei, R., Royo, S. Microcantilever Displacement Measurement Using a Mechanically Modulated Optical Feedback Interferometer. "Sensors", 29 Juny 2016, vol. 16, núm. 7, p. 997-1-997-17.
Paraules clau
atomic force microscopy, displacement measurement, nanometric resolution, optical feedback interferometry
Grup de recerca
CD6 - Centre de Desenvolupament de Sensors, Instrumentació i Sistemes
GREO - Grup de Recerca en Enginyeria Òptica

Participants