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Characterization of dielectric charging in MEMS using diffusive representation

Autor
Atienza, M.T.; Gorreta, S.; Pons, J.; Dominguez, M.
Tipus d'activitat
Article en revista
Revista
IEEE transactions on industrial electronics
Data de publicació
2016-09-22
Volum
PP
Número
99
Pàgina inicial
1
Pàgina final
1
DOI
https://doi.org/10.1109/TIE.2016.2612619 Obrir en finestra nova
Repositori
http://hdl.handle.net/2117/99524 Obrir en finestra nova
URL
http://ieeexplore.ieee.org/document/7574316/ Obrir en finestra nova
Resum
This paper introduces Diffusive Representation as a novel approach to characterize the dynamics of charge trapped in dielectric layers of microelectromechanical systems (MEMS) through a fitting process. Diffusive Representation provides a computationally efficient method to achieve an arbitrary order state-space model of the charging dynamics. This approach is particularly well suited to analyze the dynamics of the dielectric charge under non trivial controls, as in the case of sliding mode cont...
Citació
Atienza, M., Gorreta, S., Pons, J., Dominguez, M. Characterization of dielectric charging in MEMS using Diffusive Representation. "IEEE transactions on industrial electronics", 22 Setembre 2016, vol. PP, núm. 99, p. 1.
Grup de recerca
MNT - Grup de Recerca en Micro i Nanotecnologies

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