Rocas, E.; Collado, J.; Mateu, J.; Orloff, N.; Booth, J.; Aigner, R. IEEE transactions on Ultrasonics Ferroelectrics and Frequency control Vol. 60, num. 11, p. 2389-2403 DOI: 10.1109/TUFFC.2013.6644742 Data de publicació: 2013-11 Article en revista
We present the electro-thermo-mechanical constitutive relations, expanded up to the third order, for a BAW resonator. The relations obtained are implemented into a circuit model, which is validated with extensive linear and nonlinear measurements. The mathematical analysis, along with the modeling, allows us to identify the dominant terms, which are the material temperature derivatives and two intrinsic nonlinear terms, and explain, for the first time, all observable effects in a BAW resonator by use of a unified physical description. Moreover, the terms that are responsible for the second-harmonic generation and the frequency shift with dc voltage are shown to be the same.
Ochoa, D. A.; Garcia, J. E.; Perez, R.; Albareda, A. IEEE transactions on Ultrasonics Ferroelectrics and Frequency control Vol. 55, num. 12, p. 2732-2736 DOI: 10.1109/TUFFC.2008.990 Data de publicació: 2008-12 Article en revista
Albareda, A.; Perez, R.; Casals, J.A.; Garcia, J. E.; Ochoa, D. A. IEEE transactions on Ultrasonics Ferroelectrics and Frequency control Vol. 54, num. 10, p. 2175-2188 Data de publicació: 2007-10 Article en revista
Abdollahi, A.; Jiang, Z.; Arabshahi, S. IEEE transactions on Ultrasonics Ferroelectrics and Frequency control Vol. 54, num. 12, p. 2446-2455 DOI: 10.1109/TUFFC.2007.558 Data de publicació: 2007 Article en revista
The mass sensitivity of the piezoelectric surface acoustic wave (SAW) sensors is an important factor in the selection of the best gravimetric sensors for different applications. To determine this value without facing the practical problems and the long theoretical calculation time, we have shown that the mass sensitivity of SAW sensors can be calculated by a simple three-dimensional (3-D) finite-element analysis (FEA) using a commercial finite-element platform. The FEA data are used to calculate the wave propagation speed, surface particle displacements, and wave energy distribution on different cuts of various piezoelectric materials. The results are used to provide a simple method for evaluation of their mass sensitivities. Meanwhile, to calculate more accurate results from FEA data, surface and bulk wave reflection problems are considered in the analyses. in this research, different cuts of lithium niobate, quartz, lithium tantalate, and langasite piezoelectric materials are applied to investigate their acoustic wave properties. Our analyses results for these materials have a good agreement with other researchers’ results. Also, the mass sensitivity value for the novel cut of langasite was calculated through these analyses. It was found that its mass sensitivity is higher than that of the conventional Rayleigh mode quartz sensor.