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In situ grown or solid phase recrystallized P-doped mono- and polysilicon by r.f. plasma CVD

Participants

  • Baert, Kris  (autor)
  • Deschepper, Patrick  (autor)
  • Pattyn, Hugo  (autor)
  • Rodriguez Martinez, Angel  (autor)
  • Nijs, Johan  (autor)
  • Mertens, Robert  (autor)