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Zeolite-coated interdigital capacitors for humidity sensing

Autor
Urbiztondo, M.; Pellejero, I.; Rodriguez, A.; Pina, M.; Santamaría Ramiro, J.
Tipus d'activitat
Article en revista
Revista
Sensors and actuators B. Chemical
Data de publicació
2011-05-06
Volum
157
Número
2
Pàgina inicial
450
Pàgina final
459
DOI
https://doi.org/10.1016/j.snb.2011.04.089 Obrir en finestra nova
Repositori
http://hdl.handle.net/2117/13692 Obrir en finestra nova
Resum
Inter-digital capacitors (IDCs) with electrode gaps of 10 or 50 microns have been coated with zeolite films consisting of different zeolites with Si/Al ratios ranging from 1.5 (zeolite A) to infinite (silicalite). The performance of the sensor in the measurement of humidity has been related to the electrical properties of the zeolites (relative permittivity, ɛr), which in turn is a function of their Si/Al ratio. With zeolites of a high Al content the limit of detection was under 0.5 ppmV.
Citació
Urbiztondo, M. [et al.]. Zeolite-coated interdigital capacitors for humidity sensing. "Sensors and actuators B. Chemical", 06 Maig 2011, vol. 157, núm. 2, p. 450-459.
Grup de recerca
MNT - Grup de Recerca en Micro i Nanotecnologies

Participants

  • Urbiztondo Castro, Miguel Ángel  (autor)
  • Pellejero, I.  (autor)
  • Rodriguez Martinez, Angel  (autor)
  • Pina Isitia, María Pilar  (autor)
  • Santamaría Ramiro, Jesús Marcos  (autor)