Carregant...
Carregant...

Vés al contingut (premeu Retorn)

Micromachined silicon microcantilevers for gas sensing applications with capacitive read-out

Autor
Amírola, J.; Rodriguez, A.; Castañer, L.; Santos, J.; Gutiérrez, J.; Horrillo, M.
Tipus d'activitat
Article en revista
Revista
Sensors and actuators B. Chemical
Data de publicació
2005-08
Volum
11
Número
112
Pàgina inicial
247
Pàgina final
253
DOI
https://doi.org/10.1016/j.snb.2005.07.053 Obrir en finestra nova
URL
http://www.sciencedirect.com/science/article/pii/S0925400505006684 Obrir en finestra nova
Resum
The design and fabrication of a simple and low-cost micromachined silicon capacitive device is reported. Application to the detection of volatile organic compounds (VOCs) based on capacitive variations due to induced differential surface stress is presented. Good results in terms of sensitivity, reproducibility and response and recuperation times have been obtained with this type of devices. Limits of detection (LoDs) for the measured gases are below 50 ppm for toluene and 10 ppm for octane. The...
Paraules clau
Capacitive device, Gas sensor, Microcantilever, VOC
Grup de recerca
MNT - Grup de Recerca en Micro i Nanotecnologies

Participants