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Optical properties of 3D macroporous silicon structures

Autor
Garin, M.; Trifonov, T.; Rodriguez, A.; Marsal, L. F.; Alcubilla, R.
Tipus d'activitat
Article en revista
Revista
Materials science and engineering B. Solid state materials for advanced tech
Data de publicació
2008-04-15
Volum
149
Número
3
Pàgina inicial
275
Pàgina final
280
DOI
https://doi.org/10.1016/j.mseb.2007.08.006 Obrir en finestra nova
Resum
We study the optical properties of three-dimensional (3D) microstructures fabricated by electrochemical etching of macroporous silicon with modulated pore diameter. Optical measurements along the pore axis reveal photonic band gaps which are also confirmed by calculations of photonic band dispersion. We investigate numerically and experimentally the evolution of these gaps as a function of pore diameter modulation. In addition, a subsequent anisotropic etching of macroporous silicon in alkaline ...
Paraules clau
Macroporous Silicon, Three-dimensional Structures, Photonic Crystals, Electrochemical Etching, Alkaline Etching
Grup de recerca
CRnE - Centre de Recerca en Ciència i Enginyeria Multiescala de Barcelona
MNT - Grup de Recerca en Micro i Nanotecnologies

Participants