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Pulsed digital oscillators for electrostatic MEMS

Autor
Gorreta, S.; Ruiz Fernández, D.; Blokhina, E.; Pons, J.; Jimenez, V.; O'Connell, D.; Feely, O.; Madrenas, J.; Dominguez, M.
Tipus d'activitat
Article en revista
Revista
IEEE transactions on circuits and systems I: regular papers
Data de publicació
2012
Volum
59
Número
12
Pàgina inicial
2835
Pàgina final
2845
DOI
https://doi.org/10.1109/TCSI.2012.2206459 Obrir en finestra nova
Repositori
http://hdl.handle.net/2117/19706 Obrir en finestra nova
URL
http://ieeexplore.ieee.org/document/6248713/ Obrir en finestra nova
Resum
This paper introduces a new actuation scheme for implementing Pulsed Digital Oscillators (PDOs) for electrostatic MEMS resonators. In this scheme, the capacitance of the device is biased with a voltage and it is periodically sampled. Short pulses of zero voltage are applied depending on the decisions taken by the oscillator loop. The paper discusses in detail the implementation of such electrostatic PDO (e-PDO) through a prototype and links the e-PDO to the conventional PDO theory. As an example...
Citació
Gorreta, S. [et al.]. Pulsed digital oscillators for electrostatic MEMS. "IEEE transactions on circuits and systems I: regular papers", 2012, vol. 59, núm. 12, p. 2835-2845.
Paraules clau
Electrostatic actuation, microelectromechanical systems (MEMS), oscillators
Grup de recerca
AHA - Arquitectures Hardware Avançades
MNT - Grup de Recerca en Micro i Nanotecnologies

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