Layers of AlN and CNx were investigated as suitable films to coat thin film anemometers because they are simultaneously electrical isolators and thermal conductors. Thermal time constants were measured and thermal equivalent models are proposed in this work. AlN performed better in the experiments.
J. Arroyo [et al.]. Thermal response of AlN and CNx films as coatings of thin film anemometers. "Measurement", Maig 2013, vol. 46, núm. 4, p. 1421-1426.