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Thermal response of AlN and CNx films as coatings of thin film anemometers

Author
J. Arroyo; Silvestre, S.; Coll, A.; Castañer, L.
Type of activity
Journal article
Journal
Measurement
Date of publication
2013-05
Volume
46
Number
4
First page
1421
Last page
1426
DOI
https://doi.org/10.1016/j.measurement.2012.12.003 Open in new window
Project funding
AYA2010-20847
Repository
http://hdl.handle.net/2117/19864 Open in new window
URL
http://www.sciencedirect.com/science/article/pii/S0263224112004708 Open in new window
Abstract
Layers of AlN and CNx were investigated as suitable films to coat thin film anemometers because they are simultaneously electrical isolators and thermal conductors. Thermal time constants were measured and thermal equivalent models are proposed in this work. AlN performed better in the experiments.
Citation
J. Arroyo [et al.]. Thermal response of AlN and CNx films as coatings of thin film anemometers. "Measurement", Maig 2013, vol. 46, núm. 4, p. 1421-1426.
Keywords
AlN, CNx, Thin film anemometers
Group of research
MNT - Micro and Nanotechnologies Research Group

Participants