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Manufacturing and full characterization of silicon carbide-based multi-sensor micro-probes for biomedical applications

Author
Gabriel Buguña, Gemma; Erill, I.; Caro, J.; Gomez, R.; Riera, M.; Villa, R.; Godignon, P.
Type of activity
Journal article
Journal
Microelectronics journal
Date of publication
2007-03
Volume
38
Number
3
First page
406
Last page
415
DOI
https://doi.org/10.1016/j.mejo.2006.11.008 Open in new window
Abstract
Semi-insulating silicon carbide (SiC) is a fully processable semiconductors substrate that is commonly used as an alternative to conventional silicon (Si) in high-power applications. Here we examine the feasibility of using SiC as a substrate for the development of minimally invasive multi-sensor micro-probes in the context of organ monitoring during transplantation. In particular, we make a thorough comparison of Si and SiC material mechanical and electrical properties, and we extend this analy...
Group of research
GREMS - Sustainable Mining Research Group
GRINS - Intelligent Robots and Systems

Participants