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Surface passivation and optical characterization of Al2O3/a-SiCx stacks on c-Si substrates

Author
López, G.; Ortega, P.; Voz, C.; Martin, I.; Colina, M.A.; Morales, A.; Orpella, A.; Alcubilla, R.
Type of activity
Presentation of work at congresses
Name of edition
E-MRS 2013 Spring Meeting
Date of publication
2013
Presentation's date
2013-05-27
Book of congress proceedings
E-MRS 2013 Spring Meeting. Congres Center - Strasbourg, France May 27th - 31st, 2013
First page
1
Last page
1
Repository
http://hdl.handle.net/2117/26822 Open in new window
Citation
López, G. [et al.]. Surface passivation and optical characterization of Al2O3/a-SiCx stacks on c-Si substrates. A: E-MRS Spring Meeting. "E-MRS 2013 Spring Meeting. Congres Center - Strasbourg, France May 27th - 31st, 2013". Strasbourg: 2013, p. 1.
Group of research
MNT - Micro and Nanotechnologies Research Group

Participants