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A consistent methodology to characterize BAW resonators

Author
Rocas, E.; Collado, J.; Aigner, R.; Mateu, J.; Hueltes, A.; Booth, J.
Type of activity
Presentation of work at congresses
Name of edition
2012 IEEE International Ultrasonics Symposium
Date of publication
2012
Presentation's date
2012-10
Book of congress proceedings
2012 IEEE International Ultrasonics Symposium
First page
547
Last page
550
DOI
https://doi.org/10.1109/ULTSYM.2012.0136 Open in new window
Repository
http://hdl.handle.net/2117/21656 Open in new window
Abstract
We present a methodology to characterize BAW resonators both linearly and nonlinearly. The procedure uses physical modeling along with measurements that exploit different manifestations of the nonlinear phenomena to identify the dominant linear and nonlinear material properties. Such methodology allows obtaining consistent nonlinear material parameters by use of two independents measurements. We present a methodology to characterize BAW resonators both linearly and nonlinearly. The procedure ...
Citation
Rocas, E. [et al.]. A consistent methodology to characterize BAW resonators. A: IEEE International Ultrasonics Symposium. "2012 IEEE International Ultrasonics Symposium". Dresden: 2012, p. 547-550.
Keywords
Bulk Acoustic Wave resonators, Intermodulation, Second harmonic, Thermal effects, Thermodynamics
Group of research
CSC - Components and Systems for Communications Research Group

Participants