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Electro-thermo-mechanical model for bulk acoustic wave resonators

Autor
Rocas, E.; Collado, J.; Mateu, J.; Orloff, N.; Booth, J.; Aigner, R.
Tipus d'activitat
Article en revista
Revista
IEEE transactions on ultrasonics ferroelectrics and frequency control
Data de publicació
2013-11
Volum
60
Número
11
Pàgina inicial
2389
Pàgina final
2403
DOI
https://doi.org/10.1109/TUFFC.2013.6644742 Obrir en finestra nova
Repositori
http://hdl.handle.net/2117/21196 Obrir en finestra nova
Resum
We present the electro-thermo-mechanical constitutive relations, expanded up to the third order, for a BAW resonator. The relations obtained are implemented into a circuit model, which is validated with extensive linear and nonlinear measurements. The mathematical analysis, along with the modeling, allows us to identify the dominant terms, which are the material temperature derivatives and two intrinsic nonlinear terms, and explain, for the first time, all observable effects in a BAW resonator b...
Citació
Rocas, E. [et al.]. Electro-thermo-mechanical model for bulk acoustic wave resonators. "IEEE transactions on Ultrasonics Ferroelectrics and Frequency control", Novembre 2013, vol. 60, núm. 11, p. 2389-2403.
Paraules clau
Acoustic resonators, Bulk acoustic wave devices, Harmonic generation
Grup de recerca
CSC - Components and Systems for Communications Research Group

Participants