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Nanoindentation of nanocolumnar TiO2 thin films with single and stacked zig-zag layers

Autor
Jimenez-Pique, E.; Gonzalez, L.; Rico, V.; Gonzalez-Elipe, A.
Tipus d'activitat
Article en revista
Revista
Thin solid films
Data de publicació
2014-01-01
Volum
550
Pàgina inicial
444
Pàgina final
449
DOI
https://doi.org/10.1016/j.tsf.2013.10.022 Obrir en finestra nova
Repositori
http://hdl.handle.net/2117/21476 Obrir en finestra nova
URL
http://www.sciencedirect.com/science/article/pii/S0040609013016234# Obrir en finestra nova
Resum
This paper reports a systematic analysis of the mechanical properties of nanocolumnar TiO2 thin films prepared by evaporation at a glancing geometry. A systematic study of the mechanical properties is carried out by comparing the hardness and the Young's modulus determined by nanoindentation for thin films prepared at different deposition angles and characterized by a tilted nanocolumnar structure and others where the nanocolumns are perpendicular to the substrate or are arranged as zig-zag stac...
Citació
Jimenez, E. [et al.]. Nanoindentation of nanocolumnar TiO2 thin films with single and stacked zig-zag layers. "Thin solid films", 01 Gener 2014, vol. 550, p. 444-449.
Paraules clau
Glancing angle deposition, Hardness, Nanoindentation, Thin films, Titanium dioxide, Young's modulus
Grup de recerca
CIEFMA - Centre d'Integritat Estructural, Micromecànica i Fiabilitat dels Materials
CRnE - Centre de Recerca en Ciència i Enginyeria Multiescala de Barcelona

Participants

  • Jimenez Pique, Emilio  (autor)
  • Gonzalez Garcia, Lola  (autor)
  • Rico, Victor J.  (autor)
  • Gonzalez Elipe, Agustin R.  (autor)