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Nanoindentation of nanocolumnar TiO2 thin films with single and stacked zig-zag layers

Author
Jimenez-Pique, E.; Gonzalez, L.; Rico, V.; Gonzalez-Elipe, A.
Type of activity
Journal article
Journal
Thin solid films
Date of publication
2014-01-01
Volume
550
First page
444
Last page
449
DOI
https://doi.org/10.1016/j.tsf.2013.10.022 Open in new window
Repository
http://hdl.handle.net/2117/21476 Open in new window
URL
http://www.sciencedirect.com/science/article/pii/S0040609013016234# Open in new window
Abstract
This paper reports a systematic analysis of the mechanical properties of nanocolumnar TiO2 thin films prepared by evaporation at a glancing geometry. A systematic study of the mechanical properties is carried out by comparing the hardness and the Young's modulus determined by nanoindentation for thin films prepared at different deposition angles and characterized by a tilted nanocolumnar structure and others where the nanocolumns are perpendicular to the substrate or are arranged as zig-zag stac...
Citation
Jimenez, E. [et al.]. Nanoindentation of nanocolumnar TiO2 thin films with single and stacked zig-zag layers. "Thin solid films", 01 Gener 2014, vol. 550, p. 444-449.
Keywords
Glancing angle deposition, Hardness, Nanoindentation, Thin films, Titanium dioxide, Young's modulus
Group of research
CIEFMA - Structural Integrity, Micromechanics and Materials Reliability Centre
CRnE - Barcelona Research Center in Multiscale Science and Engineering

Participants

  • Jimenez Pique, Emilio  (author)
  • Gonzalez Garcia, Lola  (author)
  • Rico, Victor J.  (author)
  • Gonzalez Elipe, Agustin R.  (author)