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Differential optical feedback interferometry for the measurement of nanometric displacements

Author
Azcona, F. J.; Atashkhooei, R.; Royo, S.
Type of activity
Journal article
Journal
Óptica pura y aplicada
Date of publication
2014
Volume
47
Number
1
First page
19
Last page
25
DOI
https://doi.org/10.7149/OPA.47.1.19 Open in new window
Repository
http://hdl.handle.net/2117/22614 Open in new window
Abstract
We have recently proposed differential optical feedback interferometry as a convenient method to measure nanometric displacements. In this paper, we present experimental results to support the proposed method. The acquisition system (in particular the conditioning electronics), and, the signal processing algorithm applied to the captured signal, will be described. Obtained results show good agreement with measurements performed using a capacitive sensor employed as reference. © Sociedad Españo...
Citation
Azcona, F.; Atashkhooei, R.; Royo, S. Differential optical feedback interferometry for the measurement of nanometric displacements. "Óptica pura y aplicada", 2014, vol. 47, núm. 1, p. 19-25.
Keywords
Differential measurements, High resolution, Nanometric displacements, Nanotechnology, Optical feedback interferometry
Group of research
CD6 - Centre for Sensors, Instruments and Systems Development
GREO - Optical Engineering Research Group

Participants

  • Azcona Guerrero, Francisco Javier  (author)
  • Atashkhooei, Reza  (author)
  • Royo Royo, Santiago  (author)

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