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Optical metrology method for determining the three-dimensional topography of an orifice and apparatus for determining three-dimensional topographies according to said method

Type of property
Invention patent
Number of request
PCT 3075-4
Date of request
2004-10-08
Country
Espanya
Owner organization
UPC
Group of research
CD6 - Centre for Sensors, Instruments and Systems Development
GREO - Optical Engineering Research Group

Participants