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Diagnosis of parametric defects in dual axis IC accelerometers

Autor
Álvaro Gómez-Pau; Balado, L.; Figueras, J.
Tipus d'activitat
Article en revista
Revista
Microsystem technologies
Data de publicació
2015-09-01
Volum
21
Número
9
Pàgina inicial
1855
Pàgina final
1866
DOI
https://doi.org/10.1007/s00542-014-2218-4 Obrir en finestra nova
Projecte finançador
Impacto de la variabilidad en las estrategias de test y diagnóstico de circuitos micro/nanoelectrónicos
Resum
Microelectromechanical systems fabrication and packaging may induce parametric defects which have to be efficiently diagnosed to improve fabrication yield and device reliability. In this work, the possibilities of diagnosing single parametric defects in dual axis IC accelerometers are explored. The proposed method is a reuse of a mixed-signal diagnosis strategy based on Lissajous compositions. It consists of a dynamic correlation of the two orthogonal output signals of the device. This leads to ...
Paraules clau
CALIBRATION, CAPACITIVE ACCELEROMETER, MEMS, MICROELECTROMECHANICAL SYSTEMS, SELF-TEST
Grup de recerca
CRnE - Centre de Recerca en Ciència i Enginyeria Multiescala de Barcelona
QINE - Disseny de Baix Consum, Test, Verificació i Circuits Integrats de Seguretat

Participants