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Delta-sigma control of dielectric charge for contactless capacitive MEMS

Autor
Gorreta, S.; Pons, J.; Blokhina, E.; Feely, O.; Dominguez, M.
Tipus d'activitat
Article en revista
Revista
Journal of microelectromechanical systems
Data de publicació
2014-08-01
Volum
23
Número
4
Pàgina inicial
829
Pàgina final
841
DOI
https://doi.org/10.1109/JMEMS.2013.2295842 Obrir en finestra nova
Repositori
http://hdl.handle.net/2117/24849 Obrir en finestra nova
Resum
In this paper, we present a new closed-loop control method of dielectric charge for contactless capacitive microelectromechanical systems. The method uses a feedback loop to maintain the net charge in the dielectric layer at the desired level. We show that, under particular conditions, the control loop is similar to a thermal sigma-delta modulator as used in thermal sensors. In this way, the control actuation will inject an average charge into the dielectric to keep it at a desired level while a...
Citació
Gorreta, S. [et al.]. Delta-sigma control of dielectric charge for contactless capacitive MEMS. "Journal of microelectromechanical systems", 01 Agost 2014, vol. 23, núm. 4, p. 829-841.
Paraules clau
DEPENDENCE, DEVICES, MEMS control, MEMS reliability, SWITCHES, dielectric charging control
Grup de recerca
MNT - Grup de Recerca en Micro i Nanotecnologies

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