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Synergic and Efficient Multi-MEMS for Internet of Things Integrated on CMOS

Total activity: 7
Type of activity
Competitive project
Funding entity
Funding entity code
156.090,00 €
Start date
End date
CMOS-MEMS, Energy Harvesting, Internet de las cosas, Internet of Things (IoT), Mota, Mote, Multi-sensor, Multi-sensores, Recolección de energía, Ultra-Low-Power, Ultra-bajo consumo
The SEMIoTIC project main goal consists in investigating and providing integrated solutions to distributed sensing networks and the
Internet of Things, which contribute to minimize environmental, energetic and material costs.
In order to achieve this objective, we plan to evaluate, design and experimentally test multiple integrated microelectromechanical sensors
and the associated electronics using standard CMOS technology to implement monolithic or quasi-monolithic systems for environment
When power consumption of such systems is reduced to sub-milliwatt levels under active operation, it is possible to envisage selfpowered,
autonomous devices, also called motes, that harvest energy from the ambient and are able to provide simple sensing operations
and transmit this information to a wireless network. Thus, it is intended to demonstrate the possibility of using sensor systems in some
applications without any maintenance and being able to run indefinitely except for aging.
The project is structured in three levels:
A. Development of VLSI transduction and energy harvesting devices.
Building on the experience of the research group, various MEMS (Micro-Electro-Mechanical Systems) sensors will be developed. The
distinguishing fact is that they will be implemented in standard CMOS technology (mainly membranes) using the BEOL (Back End of Line)
process metallization layers and applying a postprocessing etching in order to release the metal layers.
Currently, a 3D accelerometer is available and it is proposed to develop at least two new MEMS sensors: a pressure sensor and a
magnetometer based on Lorentz force. In addition, CMOS photoelectric sensors, for energy harvesting, thermal sensor, for temperature
compensation, and magnetic sensors using giant magnetic resistance materials or GMR (Giant Magnetic Resistance) will be also
B. Sensor conditioning, ultra low-power and energy harvesting circuits for autonomous sensors.
MEMS Brownian noise and low signal level demand precise circuits to maximize sensor performance. In particular, pressure sensor and
Lorentz force magnetometer conditioning will be based on closed-loop oscillation of mechanical elements. Thus, this requires a chain of
signal processing circuits, analog and digital.
In many distributed sensor applications, the system must be able to work without any external connection. Thus, the required energy will
be kept to the minimum necessary and collected from the environment through energy harvesting techniques. The power management
stages must be optimized to handle very low power and voltage.
The integration feasibility of environmental energy harvesting systems together with power management circuits will be considered. Of
course, this will constrain the duty cycle of sensing operation and tradeoffs on the sensing performance will also arise.
C. Autonomous Systems.
Depending on their power balance, a subset of the transducers, circuits and devices developed above will be combined together with
control circuitry, power management and energy harvesting. The ultimate purpose is to develop a demonstration sensing prototype mote
a) Allows obtaining enhanced information from the synergy of multiple sensors
b) Meets the requirements of integration and energy. When not possible to integrate all the elements, the size of the external ones will be
minimized and connected to the multisensor chip in multi-chip modules.
Adm. Estat
Plan Estatal de Investigación Científica y Técnica y de Innovación 2013-2016
Call year
Funcding program
Programa Estatal de I+D+i Orientada a los Retos de la Sociedad
Funding call
Retos de Investigación: Proyectos de I+D+i
Grant institution
Gobierno De España. Ministerio De Economía Y Competitividad, Mineco


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