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Microcantilever Displacement Measurement Using a Mechanically Modulated Optical Feedback Interferometer

Author
Azcona, F. J.; Jha, A.; Yañez, C.; Atashkhooei, R.; Royo, S.
Type of activity
Journal article
Journal
Sensors
Date of publication
2016-06-29
Volume
16
Number
7
First page
997-1
Last page
997-17
DOI
https://doi.org/10.3390/s16070997 Open in new window
Repository
http://hdl.handle.net/2117/90027 Open in new window
URL
http://www.mdpi.com/1424-8220/16/7/997 Open in new window
Abstract
Microcantilever motion detection is a useful tool for the characterization of the physical, chemical and biological properties of materials. In the past, different approaches have been proposed and tested to enhance the behavior, size and simplicity of microcantilever motion detectors. In this paper, a new approach to measure microcantilever motion with nanometric resolution is presented. The proposed approach is based on the concept of mechanically-modulated optical feedback interferometry, a t...
Citation
Azcona, F. J., Jha, A., Yañez, C., Atashkhooei, R., Royo, S. Microcantilever Displacement Measurement Using a Mechanically Modulated Optical Feedback Interferometer. "Sensors", 29 Juny 2016, vol. 16, núm. 7, p. 997-1-997-17.
Keywords
atomic force microscopy, displacement measurement, nanometric resolution, optical feedback interferometry
Group of research
CD6 - Centre for Sensors, Instruments and Systems Development
GREO - Optical Engineering Research Group

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