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Circuit considerations and design for MEMS capacitance measurements

Author
Andrade, D.; Giounalis, P.; Gorreta, S.; Pons, J.; Dominguez, M.; Blokhina, E.
Type of activity
Presentation of work at congresses
Name of edition
12th Conference on Ph.D. Research in Microelectronics and Electronics
Date of publication
2016
Presentation's date
2016-06
Book of congress proceedings
Proceedings of 2016 12th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME)
First page
1
Last page
4
DOI
https://doi.org/10.1109/PRIME.2016.7519540 Open in new window
Abstract
Modern CMOS integrated technologies integrate a variety of complex multi-physics components which contribute a growing number of challenges in the circuit design. This paper is focused on the description of the requirements and technical aspects which should be considered for successful circuit design involving capacitive MEMS. To illustrate the process, the design of an input stage for a MEMS dielectric charge bipolar control method is presented.
Keywords
CMOS integrated circuits, CMOS integrated technology, MEMS capacitance measurements, MEMS dielectric charge bipolar control, capacitance measurement, circuit design, complex multiphysics components, integrated circuit design, micromechanical Device
Group of research
HIPICS - High Performance Integrated Circuits and Systems
MNT - Micro and Nanotechnologies Research Group

Participants

  • Andrade Miceli, Dennis Michael  (author and speaker )
  • Giounalis, P.  (author and speaker )
  • Gorreta Marine, Sergio  (author and speaker )
  • Pons Nin, Joan  (author and speaker )
  • Dominguez Pumar, Manuel M.  (author and speaker )
  • Blokhina, Elena  (author and speaker )