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Characterization of dielectric charging in MEMS using diffusive representation

Author
Atienza, M.T.; Gorreta, S.; Pons, J.; Dominguez, M.
Type of activity
Journal article
Journal
IEEE transactions on industrial electronics
Date of publication
2016-09-22
Volume
PP
Number
99
First page
1
Last page
1
DOI
https://doi.org/10.1109/TIE.2016.2612619 Open in new window
Repository
http://hdl.handle.net/2117/99524 Open in new window
URL
http://ieeexplore.ieee.org/document/7574316/ Open in new window
Abstract
This paper introduces Diffusive Representation as a novel approach to characterize the dynamics of charge trapped in dielectric layers of microelectromechanical systems (MEMS) through a fitting process. Diffusive Representation provides a computationally efficient method to achieve an arbitrary order state-space model of the charging dynamics. This approach is particularly well suited to analyze the dynamics of the dielectric charge under non trivial controls, as in the case of sliding mode cont...
Citation
Atienza, M., Gorreta, S., Pons, J., Dominguez, M. Characterization of dielectric charging in MEMS using Diffusive Representation. "IEEE transactions on industrial electronics", 22 Setembre 2016, vol. PP, núm. 99, p. 1.
Group of research
MNT - Micro and Nanotechnologies Research Group

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