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Circuit modeling of a MEMS varactor including dielectric charging dynamics

Author
Giounanlis, P.; Andrade-Miceli, D.; Gorreta, S.; Pons, J.; Dominguez, M.; Blokhina, E.
Type of activity
Journal article
Journal
Journal of physics: conference series
Date of publication
2016-06-01
Volume
757
Number
1
First page
1
Last page
7
DOI
https://doi.org/10.1088/1742-6596/757/1/012012 Open in new window
Repository
http://hdl.handle.net/2117/100953 Open in new window
URL
http://iopscience.iop.org/article/10.1088/1742-6596/757/1/012012/meta Open in new window
Abstract
Electrical models for MEMS varactors including the effect of dielectric charging dynamics are not available in commercial circuit simulators. In this paper a circuit model using lumped ideal elements available in the Cadence libraries and a basic Verilog-A model, has been implemented. The model has been used to simulate the dielectric charging in function of time and its effects over the MEMS capacitance value.
Citation
Giounanlis, P., Andrade-Miceli, D., Gorreta, S., Pons, J., Dominguez, M., Blokhina, E. Circuit modeling of a MEMS varactor including dielectric charging dynamics. "Journal of physics: conference series", 1 Juny 2016, vol. 757, núm. 1, p. 1-7.
Group of research
MNT - Micro and Nanotechnologies Research Group

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