Electrical models for MEMS varactors including the effect of dielectric charging dynamics are not available in commercial circuit simulators. In this paper a circuit model using lumped ideal elements available in the Cadence libraries and a basic Verilog-A model, has been implemented. The model has been used to simulate the dielectric charging in function of time and its effects over the MEMS capacitance value.
Giounanlis, P., Andrade-Miceli, D., Gorreta, S., Pons, J., Dominguez, M., Blokhina, E. Circuit modeling of a MEMS varactor including dielectric charging dynamics. "Journal of physics: conference series", 1 Juny 2016, vol. 757, núm. 1, p. 1-7.