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MEMS technologies for energy harvesting

Author
Dominguez, M.; Pons, J.; Chavez-Dominguez, J. A.
Type of activity
Book chapter
Book
Nonlinearity in energy harvesting systems
First page
23
Last page
63
Publisher
Springer
Date of publication
2016-11-11
ISBN
978-3-319-20354-6 Open in new window
DOI
https://doi.org/10.1007/978-3-319-20355-3_2 Open in new window
Repository
http://hdl.handle.net/2117/100923 Open in new window
URL
http://link.springer.com/chapter/10.1007/978-3-319-20355-3_2 Open in new window
Abstract
The objective of this chapter is to introduce the technology of Microelectromechanical Systems, MEMS, and their application to emerging energy harvesting devices. The chapter begins with a general introduction to the most common MEMS fabrication processes. This is followed with a survey of design mechanisms implemented in MEMS energy harvesters to provide nonlinear mechanical actuations. Mechanisms to produce bistable potential will be studied, such as introducing fixed magnets, buckling of beam...
Citation
Dominguez, M., Pons, J., Chavez-Dominguez, J. A. MEMS technologies for energy harvesting. A: "Nonlinearity in energy harvesting systems". Berlín: Springer, 2016, p. 23-63.
Keywords
Circuits and systems, Energy harvesting, Energy technology, Nanotechnology and microengineering
Group of research
GSS - Sensor Systems Group
MNT - Micro and Nanotechnologies Research Group

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