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Macroporous silicon. Technology and applications

Author
Vega, D.; Rodriguez, A.
Type of activity
Book chapter
Book
New research on silicon - Structure, properties, technology
First page
155
Last page
182
Publisher
InTech
Date of publication
2017-06
ISBN
978-953-51-3160-1 Open in new window
DOI
https://doi.org/10.5772/67698 Open in new window
Repository
http://hdl.handle.net/2117/106525 Open in new window
URL
https://www.intechopen.com/books/new-research-on-silicon-structure-properties-technology Open in new window
Abstract
The knowledge of fundamental silicon questions and all aspects of silicon technology gives the possibility of improvement to both initial silicon material and devices on silicon basis. The articles for this book have been contributed by the much respected researchers in this area and cover the most recent developments and applications of silicon technology and some fundamental questions. This book provides the latest research developments in important aspects of silicon including nanoclusters, s...
Citation
Vega, D., Rodriguez, A. Macroporous silicon. Technology and applications. A: "New research on silicon - Structure, properties, technology". InTech - Open science/Open minds, 2017, p. 155-182.
Keywords
Electrochemical etching, Field effect transistors, MEMS, Macroporous silicon, Microneedles, Supercapacitors
Group of research
MNT - Micro and Nanotechnologies Research Group

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