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Cost-effective cleaning solutions based on H2O/NH3/H2O2 mixtures for ALD Al2O3 passivated IBC c-Si solar cells

Author
Masmitja, G.; Ortega, P.; Martin, I.; Lopez, G.; Calle, E.; Gerling Sarabia, L.; Voz, C.; Alcubilla, R.
Type of activity
Presentation of work at congresses
Name of edition
11th Spanish Conference on Electron Devices
Date of publication
2017
Presentation's date
2017-02
Book of congress proceedings
11st Spanish Conference on Electron Devices (CDE 2017). Barcelona, 8-10 Frebuary 2017
First page
102
Last page
104
DOI
https://doi.org/10.1109/CDE.2017.7905228 Open in new window
URL
https://ieeexplore.ieee.org/document/7905228/ Open in new window
Group of research
MNT - Micro and Nanotechnologies Research Group

Participants