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Energy-efficient full-range oscillation analysis of parallel-plate electrostatically actuated MEMS resonators

Author
Fargas-Marques, A.; Costa-Castelló, R.
Type of activity
Journal article
Journal
Nonlinear dynamics
Date of publication
2017-09-01
Volume
89
Number
4
First page
2889
Last page
2904
DOI
https://doi.org/10.1007/s11071-017-3633-8 Open in new window
Repository
http://hdl.handle.net/2117/107584 Open in new window
URL
https://link.springer.com/article/10.1007%2Fs11071-017-3633-8 Open in new window
Abstract
Electrostatic parallel-plate actuators are a common way of actuating microelectromechanical systems, both statically and dynamically. Nevertheless, actuation voltages and oscillations are limited by the nonlinearity of the actuator that leads to the pull-in phenomena. This work presents a new approach to obtain the electrostatic parallel-plate actuation voltage, which allows to freely select the desired frequency and amplitude of oscillation. Harmonic Balance analysis is used to determine the ne...
Citation
Fargas-Marques, A., Costa-Castelló, R. Energy-efficient full-range oscillation analysis of parallel-plate electrostatically actuated MEMS resonators. "Nonlinear dynamics", 1 Setembre 2017, vol. 89, núm. 4, p. 2889-2904.
Keywords
Energy efficiency, Harmonic Balance, Microsystems, Parallel-plate electrostatic actuation
Group of research
CS2AC-UPC - Supervision, Safety and Automatic Control
SAC - Advanced Control Systems

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