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A flexoelectric microelectromechanical system on silicon

Author
Bhaskar, U.; Banerjee, N.; Abdollahi, A.; Wang, Z.; Scholm, D. G.; Rijnders, G.; Catalan, G.
Type of activity
Journal article
Journal
Nature nanotechnology
Date of publication
2016
Volume
11
First page
263
Last page
266
DOI
https://doi.org/10.1039/C5NR06514C Open in new window
Repository
http://hdl.handle.net/2117/116673 Open in new window
URL
https://www.nature.com/articles/nnano.2015.260 Open in new window
Abstract
Flexoelectricity allows a dielectric material to polarize in response to a mechanical bending moment and, conversely, to bend in response to an electric field. Compared with piezoelectricity, flexoelectricity is a weak effect of little practical significance in bulk materials. However, the roles can be reversed at the nanoscale. Here, we demonstrate that flexoelectricity is a viable route to lead-free microelectromechanical and nanoelectromechanical systems. Specifically, we have fabricated a si...
Citation
Bhaskar, U., Banerjee, N., Abdollahi, A., Wang, Z., Scholm, D. G., Rijnders, G., Catalan, G. A flexoelectric microelectromechanical system on silicon. "Nature nanotechnology", 2016, vol. 11, p. 263-266.
Keywords
MEMS, flexoelectricity, nanoscale, piezoelectrics
Group of research
LACÀN - Numerical Methods for Applied Sciences and Engineering

Participants

  • Bhaskar, Umesh Kumar  (author)
  • Banerjee, Nirupam  (author)
  • Abdollahi Hosnijeh, Amir  (author)
  • Wang, Zhen  (author)
  • Scholm, Darrell G.  (author)
  • Rijnders, Guus  (author)
  • Catalan, Gustau  (author)

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