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Experiments on MEMS Integration in 0.25 turn CMOS Process

Author
Michalik, P. J.; Fernandez, D.; Wietstruck, M.; Kaynak, M.; Madrenas, J.
Type of activity
Journal article
Journal
Sensors
Date of publication
2018-07-01
Volume
18
Number
7
First page
2111-1
Last page
2111-22
DOI
https://doi.org/10.3390/s18072111 Open in new window
Project funding
Sistema en chip micro-electro-mecánico (MEMSOC)
Synergic and Efficient Multi-MEMS for Internet of Things Integrated on CMOS
Repository
http://hdl.handle.net/2117/121276 Open in new window
URL
http://www.mdpi.com/1424-8220/18/7/2111 Open in new window
Abstract
In this paper, we share our practical experience gained during the development of CMOS-MEMS (Complementary Metal-Oxide Semiconductor Micro Electro Mechanical Systems) devices in IHP SG25 technology. The experimental prototyping process is illustrated with examples of three CMOS-MEMS chips and starts from rough process exploration and characterization, followed by the definition of the useful MEMS design space to finally reach CMOS-MEMS devices with inertial mass up to 4.3 µg and resonance frequ...
Citation
Michalik, P. J., Fernández, D., Wietstruck, M., Kaynak, M., Madrenas, J. Experiments on MEMS Integration in 0.25 turn CMOS Process. "Sensors", 1 Juliol 2018, vol. 18, núm. 7, p. 2111-1-2111-22.
Keywords
Accelerometer, BEOL (Back End of Line), CMOS, CMOS-MEMS, MEMS
Group of research
ISSET - Integrated Smart Sensors and Health Technologies

Participants

  • Michalik, Piotr Jozef  (author)
  • Fernandez, Daniel  (author)
  • Wietstruck, Mehmet  (author)
  • Kaynak, Mehmet  (author)
  • Madrenas Boadas, Jordi  (author)

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