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Sub-micrometric profilometry of non-rotationally symmetrical surfaces using the Ronchi test

Author
Royo, S.; Arasa, J.; Caum, J.
Type of activity
Presentation of work at congresses
Name of edition
SPIE's 45th annual meeting:International symposium on optical science and technology
Date of publication
2000
Book of congress proceedings
Laser Interferometry X
First page
153
Last page
164
Group of research
CD6 - Centre for Sensors, Instruments and Systems Development
GREO - Optical Engineering Research Group

Participants