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RF-MEMS switches designed for high-performance uniplanar microwave and mm-wave circuits

Author
Pradell, L.; Girbau, D.; Ribó, M.; Casals-Terré, J.; Lázaro, A.; Contreras, A.; Llamas, M.; Heredia, J.; Giacomozzi, F.; Margesin, B.
Type of activity
Book chapter
Book
MEMS sensors: design and application
First page
117
Last page
146
Publisher
IntechOpen
Date of publication
2018-07-18
ISBN
978-1-78923-395-7 Open in new window
DOI
https://doi.org/10.5772/intechopen.71153 Open in new window
Repository
http://hdl.handle.net/2117/128333 Open in new window
URL
https://www.intechopen.com/books/mems-sensors-design-and-application Open in new window
Abstract
Radio frequency microelectromechanical system (RF-MEMS) switches have demonstrated superior electrical performance (lower loss and higher isolation) compared to semiconductor-based devices to implement reconigurable microwave and millimeter(mm)-wave circuits. In this chapter, electrostatically actuated RF-MEMS switch conigurations that can be easily integrated in uniplanar circuits are presented. The design procedure and fabrication process of RF-MEMS switch topologies able to control the propag...
Citation
Pradell, L. [et al.]. RF-MEMS switches designed for high-performance uniplanar microwave and mm-wave circuits. A: "MEMS sensors: design and application". London: IntechOpen, 2018, p. 117-146.
Keywords
Circuit simulation, Electromechanical simulation, Filters, MEMS fabrication technology, Phase switches, RF-MEMS switches, Reconigurable microwave circuits, Uniplanar multimodal circuits
Group of research
CommSensLab-UPC - Centre Específic de Recerca en Comunicació i Detecció UPC
MICROTECH LAB - Microtechnology for the Industry
RF&MW - Laboratory of RF & microwave systems, devices and materials

Participants

  • Pradell Cara, Lluis  (author)
  • Girbau Sala, David  (author)
  • Ribó Pal, Miquel  (author)
  • Casals Terre, Jasmina  (author)
  • Lázaro Guillén, Antonio  (author)
  • Contreras Lizárraga, Adrián  (author)
  • Llamas Morote, Marco Antonio  (author)
  • Heredia Vega, Julio César  (author)
  • Giacomozzi, Flavio  (author)
  • Margesin, Benno  (author)

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