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Analysis of surface passivation of c-Si with phosphorous doped amorphous SiCx(N):H layers deposited by PECVD

Author
Ferré, R.; Martin, I.; Vetter, M.; Orpella, A.; Alcubilla, R.
Type of activity
Presentation of work at congresses
Name of edition
2005 Spanish Conference on Electron Devices (CDE 2005)
Date of publication
2005
Book of congress proceedings
Libro de Abstracts del CDE 2005 - 5a Conferencia de Dispositivos Electrònicos
First page
74
Last page
74
Group of research
MNT - Micro and Nanotechnologies Research Group

Participants