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OXYGEN ABSORTION AND LOCAL STRUCTURE IN AMORPHOUS SILICON CARBON ALLOYS

Author
Calderer, J.
Type of activity
Presentation of work at congresses
Name of edition
1ST INTERNATIONAL CONFERENCE ON MATERIALS FOR MICROELECTRONICS
Date of publication
1994
Presentation's date
1994-10-17
Group of research
MNT - Micro and Nanotechnologies Research Group

Participants