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A mixed-signal control system for Lorentz-force resonant MEMS magnetometers

Author
J.M. Sánchez-Chiva; Valle, J.; Fernández, D.; Madrenas, J.
Type of activity
Journal article
Journal
IEEE sensors journal
Date of publication
2019-09-01
Volume
19
Number
17
First page
7479
Last page
7488
DOI
10.1109/JSEN.2019.2913459
Project funding
Synergic and Efficient Multi-MEMS for Internet of Things Integrated on CMOS
Repository
http://hdl.handle.net/2117/168398 Open in new window
URL
https://ieeexplore.ieee.org/document/8701467 Open in new window
Abstract
This paper presents a mixed-signal closed-loop control system for Lorentz force resonant MEMS magnetometers. The control system contributes to 1) the automatic phase control of the loop, that allows start-up and keeps self-sustained oscillation at the MEMS resonance frequency, and 2) output offset reduction due to electrostatic driving by selectively disabling it. The proposed solution proof-of-concept has been tested with a Lorentz force-based MEMS magnetometer. The readout electronic circuitry...
Citation
J.M. Sánchez-Chiva [et al.]. A mixed-signal control system for Lorentz-force resonant MEMS magnetometers. "IEEE sensors journal", 1 Setembre 2019, vol. 19, núm. 17, p. 7479-7488.
Keywords
Digital control, Lorentz force, MEMS, Magnetic sensor, Magnetometer, Offset suppression
Group of research
ISSET - Integrated Smart Sensors and Health Technologies

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