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Macroporous silicon filters, a versatile platform for NDIR spectroscopic gas sensing in the MIR

Author
Cardador, D.; Segura, D.; Deriziotis, I.; Rodriguez, A.; Llorca, J.
Type of activity
Journal article
Journal
Journal of the Electrochemical Society
Date of publication
2019-07-23
Volume
166
Number
12
First page
B1010
Last page
B1015
DOI
10.1149/2.1051912jes
Repository
http://hdl.handle.net/2117/178813 Open in new window
URL
http://jes.ecsdl.org/content/166/12/B1010.full Open in new window
Abstract
This paper describes the spectroscopic detection of gases using macroporous silicon photonic crystals as narrow filters. The study begins by demonstrating the feasibility of photoelectrochemical etching to fabricate narrow filters along the mid infrared band. Next, we focus on the filter centered on the carbon dioxide fingerprint. The filter response is described for three different cell lengths and concentrations below 1%. Results show a concordance with the reformulated Beer-Lambert law. This ...
Citation
Cardador, D. [et al.]. Macroporous silicon filters, a versatile platform for NDIR spectroscopic gas sensing in the MIR. "Journal of the Electrochemical Society", 23 Juliol 2019, vol. 166, núm. 12, p. B1010-B1015.
Keywords
Etching - alectrochemical, Macroporous silicon photonic crystals, Narrow filters, Spectroscopic detection
Group of research
CRnE - Barcelona Research Center in Multiscale Science and Engineering
MNT - Micro and Nanotechnologies Research Group
NEMEN - Nanoengineering of Materials Applied to Energy

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