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Third-Harmonic and intermodulation distortion in bulk acoustic-wave resonators

Author
Garcia, D.; Collado, J.; Mateu, J.; Aigner, R.
Type of activity
Journal article
Journal
IEEE transactions on microwave theory and techniques
Date of publication
2019-12-17
First page
1
Last page
8
DOI
10.1109/TMTT.2019.2955135
Repository
http://hdl.handle.net/2117/180458 Open in new window
URL
https://ieeexplore.ieee.org/document/8935520 Open in new window
Abstract
This article discusses on the measured third-order intermodulation (IMD3) products and third harmonics (H3) appearing in a set of six different solidly mounted resonators (SMR) and bulk acoustic-wave (BAW) resonators with different shapes and stack configurations. The discussion is supported by a comprehensive nonlinear distributed circuit model that considers the nonlinear effects potentially occurring in any layer of the resonator stack. The aluminum-nitride (AlN) and silicon-dioxide (SiO2) la...
Keywords
Aluminum nitride (AlN), Bulk acoustic wave (BAW), Electroacoustic, Nonlinear, Nonlinearities, Silicon dioxide SiO2, Solidly mounted resonators (SMRs), Third-harmonic (H3) , third-order intermodulation (IMD3) , third-order intermodulation (IMD3) product
Group of research
CSC - Components and Systems for Communications Research Group

Participants