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SILICON SURFACE PASSIVATION BY PLASMA ENHANCED CHEMICAL VAPOR DEPOSITED AMORPHOUS SILICON CARBIDE FILMS

Author
Martin, I.
Type of activity
Theses
Other related units
Department of Electronic Engineering
Defense's date
2004-01-16
Award
2006 UPC Phd award
Group of research
MNT - Micro and Nanotechnologies Research Group

Participants