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FOCSI: A new layout regularity metric

Author
Pons, M.; Moll, F.; Rubio, A.; Abella, J.; Vera, F.J.; Gonzalez, A.
Type of activity
Report
Date
2009-06-09
Repository
http://hdl.handle.net/2117/13385 Open in new window
Abstract
Digital CMOS Integrated Circuits (ICs) suffer from serious layout features printability issues associated to the lithography manufacturing process. Regular layout designs are emerging as alternative solutions to reduce these ICs systematic subwavelength lithography failures. However, there is no metric to evaluate and compare the layout regularity of those regular designs. In this paper we propose a new layout regularity metric called Fixed Origin Corner Square Inspection (FOCSI). FOCSI allows t...
Group of research
ARCO - Microarchitecture and Compilers
HIPICS - High Performance Integrated Circuits and Systems

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