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Micrometric non-contact profiler for optical-quality surfaces

Author
Royo, S.; Arasa, J.; Caum, J.
Type of activity
Journal article
Journal
Measurement science and technology
Date of publication
2001-01
Volume
12
Number
1
First page
89
Last page
96
Group of research
CD6 - Centre for Sensors, Instruments and Systems Development
GREO - Optical Engineering Research Group

Participants