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Speed-Energy Optimization of Electrostatic Actuators Based on Pull-In

Author
Castañer, L.; Senturia, S.
Type of activity
Journal article
Journal
Journal of microelectromechanical systems
Date of publication
1999-09
Volume
8
Number
3
First page
290
Last page
298
Group of research
MNT - Micro and Nanotechnologies Research Group

Participants