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Photosensor and optical waveguide coupling in silicon technology

Author
Moreno, M.; Domínguez, C.; Muñoz, J.; Calderer, J.; Morante, J.
Type of activity
Journal article
Journal
Sensors and actuators A. Physical
Date of publication
1997-07
Volume
A62
Number
1-3
First page
524
Last page
528
Group of research
MNT - Micro and Nanotechnologies Research Group
SARTI - Technological Development Center for Remote Acquisition and Data Processing System

Participants