Loading...
Loading...

Go to the content (press return)

Effects of oxygen partial pressure and annealing temperature on the formation of sputtered tungsten oxide films

Author
Bittencourt, C.; Landers, R.; Llobet, E.; Molas, G.; Correig, X.; Silva, M.; Calderer, J.
Type of activity
Journal article
Journal
Journal of the Electrochemical Society
Date of publication
2002-02
Number
149
First page
81
Last page
86
Group of research
MNT - Micro and Nanotechnologies Research Group

Participants

  • Bittencourt, C  (author)
  • Landers, R  (author)
  • Llobet Valero, Eduard  (author)
  • Molas, G  (author)
  • Correig, X  (author)
  • Silva, M A P  (author)
  • Calderer Cardona, Josep  (author)